Atomic layer deposition of lithium containing thin films

Matti Putkonen, Titta Aaltonen, Mari Alnes, Timo Sajavaara, Ola Nilsen, Helmer Fjellvåg

    Research output: Contribution to journalArticleScientificpeer-review

    64 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)8767-8771
    JournalJournal of Materials Chemistry
    Volume19
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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