Atomic layer deposition of iridium(III) acetylacetonate on alumina, silica-alumina, and silica supports

Riitta Silvennoinen, Olli Jylhä, Marina Lindblad, Jani Sainio, Riikka Puurunen, Outi Krause

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)
Original languageEnglish
Pages (from-to)4103-4111
JournalApplied Surface Science
Volume253
Issue number9
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

Keywords

  • alumina
  • atomic layer deposition (ALD)
  • iridium
  • silica
  • silica-alumina

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