Atomic Layer Deposition of Hexagonal and Orthorhombic YMnO3 Thin Films

K. Uusi-Esko, J. Malm, Maarit Karppinen

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5691-5694
    JournalChemistry of Materials
    Volume21
    Issue number23
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Cite this