Atomic layer deposition of Gd_(2)O_(3) and Ce_(1-x)Gd_(x)O_(2-0.5x) thin films

Jaakko Niinistö, Jani Päiväsaari, Matti Putkonen, Lauri Niinistö, Emmanuel Gourba, Michel Cassir

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationTartu, Estonia
    Pages35
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe Fifth Baltic Symposium on Atomic Layer Deposition (BALD-5), Tartu, Estonia, 24-26 October 2002
    PublisherInstitute of Physics, University of Tartu

    Keywords

    • ALD
    • thin films
    • YSZ

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