Atomic Layer Deposition of Ga2O3 Films from a Dialkylamido-Based Precursor

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Charles L. Dezelah IV
  • Jaakko Niinistö
  • Charles H. Winter
  • Lauri Niinistö

Research units

Details

Original languageEnglish
Pages (from-to)471-475
JournalChemistry of Materials
Volume18
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

ID: 2399048