Atomic Layer Deposition of Ga2O3 Films from a Dialkylamido-Based Precursor

Charles L. Dezelah IV, Jaakko Niinistö, Charles H. Winter, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    53 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)471-475
    JournalChemistry of Materials
    Volume18
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

    Cite this