Atomic Layer Deposition of Erbium Oxide Thin Films

Jani Päiväsaari, Matti Putkonen, Timo Sajavaara, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationGeneva, Switzerland
    Publication statusPublished - 2003
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name5th International Conference on f-elements ICFE'5
    PublisherEuropean Rare Earth and Actinide Society


    • atomic layer deposition
    • erbium oxide
    • thin films

    Cite this

    Päiväsaari, J., Putkonen, M., Sajavaara, T., & Niinistö, L. (2003). Atomic Layer Deposition of Erbium Oxide Thin Films. (pp. 107). (5th International Conference on f-elements ICFE'5).