Atomic Layer Deposition of Copper Metal Films from Cu(acac)2 and Hydroquinone Reductant

Tripurari Sharan Tripathi, Martin Wilken, Christian Hoppe, Teresa de los Arcos, Guido Grundmeier, Anjana Devi, Maarit Karppinen*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
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Chemical Engineering