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Atomic layer deposition of complex thin films
Esko Ahvenniemi
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Dive into the research topics of 'Atomic layer deposition of complex thin films'. Together they form a unique fingerprint.
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Engineering
Atomic Layer Deposition
100%
Thin Films
100%
Hybrid
30%
Manganese
30%
Copper
30%
Molecular Layer
20%
Calcium
20%
Deposition Process
20%
Applications
10%
Research
10%
Architecture
10%
Combines
10%
Semiconductor
10%
Thickness
10%
Substrates
10%
Acid
10%
Solid Oxide Fuel Cell
10%
Nanoscale
10%
Nanometre
10%
Organic Molecule
10%
Bulk Property
10%
Deeper Understanding
10%
Chemistry
Liquid Film
100%
Atomic Layer Epitaxy
100%
Magnetic Linear Dichroism
30%
Procedure
20%
Oxide
20%
Cathode
20%
Deposition Process
20%
Chemistry
10%
Industry
10%
Metal
10%
Reaction Temperature
10%
Application
10%
Number
10%
Organic Molecule
10%
Solid Oxide Fuel Cells
10%
Thickness
10%
Semiconductor
10%
Device
10%
Metal Ion
10%
Molecular Layer
10%
Diol
10%
Dicarboxylic Acid
10%
Material Science
Thin Films
100%
Material
40%
Cobalt
30%
Devices
30%
Metal
20%
Oxide
20%
Temperature
10%
Solid
10%
Semiconductor Material
10%
Cell
10%
Fuel
10%
Cathode
10%
Cathode Material
10%