Atomic Layer Deposition of Biomimetic Ca-P-O Films

Matti Putkonen, Timo Sajavaara, Paavo Rahkila, Harry James Whitlow, Sulin Cheng, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California, 24-27 June 2007
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

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