Atomic Layer Deposition of Amino-Functionalized Silica Surfaces Using N-(2-Aminoethyl)-3-aminopropyltrimethoxysilane as a Silylating Agent

Satu Ek, Eero I. Iiskola, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    28 Citations (Scopus)
    Original languageEnglish
    JournalJournal of Physical Chemistry B
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD (atomic layer deposition)
    • aminopropylsilane
    • gas-solid reactions
    • silica

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