Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

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Original languageEnglish
Pages (from-to)8818-8825
JournalJournal of Nanoscience and Nanotechnology
Volume11
Issue number10
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

ID: 792123