Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Kestutis Grigoras; Marina Y. Zavodchikova; Albert G. Nasibulin; Esko I. Kauppinen; Vladimir Ermolov; Sami Franssila

doi:10.1166/jnn.2011.3471

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Kestutis Grigoras
, Marina Y. Zavodchikova
, Albert G. Nasibulin
, Esko I. Kauppinen
, Vladimir Ermolov
, Sami Franssila

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Web of Science)

Original language	English
Pages (from-to)	8818-8825
Journal	Journal of Nanoscience and Nanotechnology
Volume	11
Issue number	10
DOIs	https://doi.org/10.1166/jnn.2011.3471
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

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10.1166/jnn.2011.3471

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title = "Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation",

author = "Kestutis Grigoras and Zavodchikova, \{Marina Y.\} and Nasibulin, \{Albert G.\} and Kauppinen, \{Esko I.\} and Vladimir Ermolov and Sami Franssila",

year = "2011",

doi = "10.1166/jnn.2011.3471",

language = "English",

volume = "11",

pages = "8818--8825",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

number = "10",

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TY - JOUR

T1 - Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

AU - Grigoras, Kestutis

AU - Zavodchikova, Marina Y.

AU - Nasibulin, Albert G.

AU - Kauppinen, Esko I.

AU - Ermolov, Vladimir

AU - Franssila, Sami

PY - 2011

Y1 - 2011

UR - http://tfy.tkk.fi/nanomat/PDF%20publications/Kestas.pdf

U2 - 10.1166/jnn.2011.3471

DO - 10.1166/jnn.2011.3471

M3 - Article

SN - 1533-4880

VL - 11

SP - 8818

EP - 8825

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 10

ER -

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

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