Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Kestutis Grigoras; Marina Y. Zavodchikova; Albert G. Nasibulin; Esko I. Kauppinen; Vladimir Ermolov; Sami Franssila

doi:10.1166/jnn.2011.3471

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Kestutis Grigoras, Marina Y. Zavodchikova, Albert G. Nasibulin, Esko I. Kauppinen, Vladimir Ermolov, Sami Franssila

Research output: Contribution to journal › Article › Scientific › peer-review

20 Citations (Scopus)

Original language	English
Pages (from-to)	8818-8825
Journal	Journal of Nanoscience and Nanotechnology
Volume	11
Issue number	10
DOIs	https://doi.org/10.1166/jnn.2011.3471
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

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10.1166/jnn.2011.3471

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@article{feee190f995f47beb0f04174bd4d395a,

title = "Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation",

author = "Kestutis Grigoras and Zavodchikova, {Marina Y.} and Nasibulin, {Albert G.} and Kauppinen, {Esko I.} and Vladimir Ermolov and Sami Franssila",

year = "2011",

doi = "10.1166/jnn.2011.3471",

language = "English",

volume = "11",

pages = "8818--8825",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

number = "10",

}

TY - JOUR

T1 - Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

AU - Grigoras, Kestutis

AU - Zavodchikova, Marina Y.

AU - Nasibulin, Albert G.

AU - Kauppinen, Esko I.

AU - Ermolov, Vladimir

AU - Franssila, Sami

PY - 2011

Y1 - 2011

UR - http://tfy.tkk.fi/nanomat/PDF%20publications/Kestas.pdf

U2 - 10.1166/jnn.2011.3471

DO - 10.1166/jnn.2011.3471

M3 - Article

SN - 1533-4880

VL - 11

SP - 8818

EP - 8825

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 10

ER -

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

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