Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Ville Rontu, Perttu Sippola, Mikael Broas, Glenn Ross, Harri Lipsanen, Mervi Paulasto-Kröckel, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
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