Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores

Sari Sirviö, L. Sainiemi, S. Franssila, K. Grigoras

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Title of host publicationTransducers 07, Lyon, France, 10-14.06.2007
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication


    • ALD
    • alumina
    • porous materials
    • titania

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