Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores

Sari Sirviö, L. Sainiemi, S. Franssila, K. Grigoras

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Keywords

@inproceedings{d004fa5f74854bf7bb0378aea8871a10,

title = "Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores",

keywords = "ALD, alumina, porous materials, titania, ALD, alumina, porous materials, titania, ALD, alumina, porous materials, titania",

author = "Sari Sirvi{\"o} and L. Sainiemi and S. Franssila and K. Grigoras",

year = "2007",

language = "English",

pages = "521--524",

booktitle = "Transducers 07, Lyon, France, 10-14.06.2007",

}

TY - GEN

T1 - Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores

AU - Sirviö, Sari

AU - Sainiemi, L.

AU - Franssila, S.

AU - Grigoras, K.

PY - 2007

Y1 - 2007

KW - ALD

KW - alumina

KW - porous materials

KW - titania

KW - ALD

KW - alumina

KW - porous materials

KW - titania

KW - ALD

KW - alumina

KW - porous materials

KW - titania

M3 - Conference article in proceedings

SP - 521

EP - 524

BT - Transducers 07, Lyon, France, 10-14.06.2007

ER -