Atomic layer deposition enhanced rapid fabrocation of released micromechanical devices for research purposes

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review


Research units


Original languageEnglish
Title of host publicationPhysics Days, XLI Annual Conference of the Finnish Physical Society, Tallinn, Estonia, 15-17 March
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication

    Research areas

  • atomic layer deposition, cryogenic etching, fabrication, micromechanics

ID: 7513865