@inproceedings{37aaea8c67f04e699856b96b54ca7ea7,
title = "Atomic layer deposition enhanced rapid fabrocation of released micromechanical devices for research purposes",
keywords = "atomic layer deposition, cryogenic etching, fabrication, micromechanics, atomic layer deposition, cryogenic etching, fabrication, micromechanics, atomic layer deposition, cryogenic etching, fabrication, micromechanics",
author = "Nikolai Chekurov and Mika Koskenvuori and V-M Airaksinen and Ilkka Tittonen",
year = "2007",
language = "English",
booktitle = "Physics Days, XLI Annual Conference of the Finnish Physical Society, Tallinn, Estonia, 15-17 March",
}