Atomic layer deposition enhanced rapid fabrocation of released micromechanical devices for research purposes

Nikolai Chekurov, Mika Koskenvuori, V-M Airaksinen, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationPhysics Days, XLI Annual Conference of the Finnish Physical Society, Tallinn, Estonia, 15-17 March
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication


  • atomic layer deposition
  • cryogenic etching
  • fabrication
  • micromechanics

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