Atomic layer deposition enhanced rapid fabrocation of released micromechanical devices for research purposes

Nikolai Chekurov, Mika Koskenvuori, V-M Airaksinen, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationPhysics Days, XLI Annual Conference of the Finnish Physical Society, Tallinn, Estonia, 15-17 March
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication

Keywords

  • atomic layer deposition
  • cryogenic etching
  • fabrication
  • micromechanics

Cite this

Chekurov, N., Koskenvuori, M., Airaksinen, V-M., & Tittonen, I. (2007). Atomic layer deposition enhanced rapid fabrocation of released micromechanical devices for research purposes. In Physics Days, XLI Annual Conference of the Finnish Physical Society, Tallinn, Estonia, 15-17 March