Atomic Layer Deposition as a Tool for Advanced Nanotechnology

V. Tuzovskiy, Matti Putkonen, T. Kääriäinen, M. Tanttari, D. Cameron, J. Hiltunen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationFourth National Conference with international participation «Surface Chemistry and Nanotechnology», Hilovo, Russia 28.9-4.10.2009
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

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