Atomic Layer Deposition as a Tool for Advanced Nanotechnology

V. Tuzovskiy, Matti Putkonen, T. Kääriäinen, M. Tanttari, D. Cameron, J. Hiltunen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Fourth National Conference with international participation «Surface Chemistry and Nanotechnology», Hilovo, Russia 28.9-4.10.2009
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication

Cite this

@inproceedings{bc3a976400654b22aa26e3019758d1e9,

title = "Atomic Layer Deposition as a Tool for Advanced Nanotechnology",

author = "V. Tuzovskiy and Matti Putkonen and T. K{\"a}{\"a}ri{\"a}inen and M. Tanttari and D. Cameron and J. Hiltunen",

year = "2009",

language = "English",

booktitle = "Fourth National Conference with international participation «Surface Chemistry and Nanotechnology», Hilovo, Russia 28.9-4.10.2009",

}

Atomic Layer Deposition as a Tool for Advanced Nanotechnology. / Tuzovskiy, V.; Putkonen, Matti; Kääriäinen, T.; Tanttari, M.; Cameron, D.; Hiltunen, J.

Fourth National Conference with international participation «Surface Chemistry and Nanotechnology», Hilovo, Russia 28.9-4.10.2009. 2009.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Atomic Layer Deposition as a Tool for Advanced Nanotechnology

AU - Tuzovskiy, V.

AU - Putkonen, Matti

AU - Kääriäinen, T.

AU - Tanttari, M.

AU - Cameron, D.

AU - Hiltunen, J.

PY - 2009

Y1 - 2009

M3 - Conference contribution

BT - Fourth National Conference with international participation «Surface Chemistry and Nanotechnology», Hilovo, Russia 28.9-4.10.2009

ER -