Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Professional

Original language	English
Title of host publication	European Conference on NanoFilms (ECNF 2010), Liege, Belgium, March 22-25, 2010, (Proceedings paper)
Publication status	Published - 2010
MoE publication type	D3 Professional conference proceedings

Cite this

@inproceedings{fd7671a30acf47409713049480741d86,

title = "Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials",

author = "Terhi Hirvikorpi and Mika V{\"a}h{\"a}-Nissi and Ali Harlin and Maarit Karppinen",

year = "2010",

language = "English",

booktitle = "European Conference on NanoFilms (ECNF 2010), Liege, Belgium, March 22-25, 2010, (Proceedings paper)",

}

Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials. / Hirvikorpi, Terhi; Vähä-Nissi, Mika; Harlin, Ali et al.
European Conference on NanoFilms (ECNF 2010), Liege, Belgium, March 22-25, 2010, (Proceedings paper). 2010.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Professional