Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Maarit Karppinen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationNPD 2010, Helsinki, Finland, May 24-26, 2010
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication

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