Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

Jenni Harjuoja; Anne Kosola; Matti Putkonen; Lauri Niinistö

Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

Jenni Harjuoja, Anne Kosola, Matti Putkonen, Lauri Niinistö

Research output: Contribution to journal › Article › Scientific › peer-review

48 Citations (Scopus)

Original language	English
Pages (from-to)	346-352
Journal	Thin Solid Films
Volume	496
Issue number	2
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Keywords

ALD
Atomic Layer Deposition
Lead titanate
thin film

Cite this

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title = "Atomic layer deposition and post-deposition annealing of PbTiO3 thin films",

keywords = "ALD, Atomic Layer Deposition, Lead titanate, thin film, ALD, Atomic Layer Deposition, Lead titanate, thin film, ALD, Atomic Layer Deposition, Lead titanate, thin film",

author = "Jenni Harjuoja and Anne Kosola and Matti Putkonen and Lauri Niinist{\"o}",

year = "2006",

language = "English",

volume = "496",

pages = "346--352",

journal = "Thin Solid Films",

issn = "1879-2731",

publisher = "Elsevier",

number = "2",

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TY - JOUR

T1 - Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

AU - Harjuoja, Jenni

AU - Kosola, Anne

AU - Putkonen, Matti

AU - Niinistö, Lauri

PY - 2006

Y1 - 2006

KW - ALD

KW - Atomic Layer Deposition

KW - Lead titanate

KW - thin film

KW - ALD

KW - Atomic Layer Deposition

KW - Lead titanate

KW - thin film

KW - ALD

KW - Atomic Layer Deposition

KW - Lead titanate

KW - thin film

UR - http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TW0-4H6XKSR-K-1&_cdi=5548&_user=952938&_orig=browse&_coverDate=02%2F21%2F2006&_sk=995039997&view=c&wchp=dGLbVtz-zSkWz&md5=a4cb5d1e2bc75d3f2385

M3 - Article

SN - 1879-2731

VL - 496

SP - 346

EP - 352

JO - Thin Solid Films

JF - Thin Solid Films

IS - 2

ER -

Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

Keywords

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Cite this