Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

Jenni Harjuoja, Anne Kosola, Matti Putkonen, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    44 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)346-352
    JournalThin Solid Films
    Volume496
    Issue number2
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • Atomic Layer Deposition
    • Lead titanate
    • thin film

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