Atomic layer deposited thin films for corrosion protection

R. Matero, M. Ritala, M. Leskelä, T. Salo, J. Aromaa, O. Forsén

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)493-499
    JournalJournal de Physique IV
    Volume9
    Issue numberPr8
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed

    Keywords

    • aluminium oxide
    • atomic layer deposition
    • coating
    • electrochemical impedance spectroscopy
    • tantalum oxide
    • titanium oxide

    Cite this

    Matero, R., Ritala, M., Leskelä, M., Salo, T., Aromaa, J., & Forsén, O. (1999). Atomic layer deposited thin films for corrosion protection. Journal de Physique IV, 9(Pr8), 493-499.