Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

V. Miikkulainen, O. Nilsen, Han Li, S.W. King, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageEnglish
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

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