Atomic layer deposited aluminum oxide barrier coatings for packaging materials

Terhi Hirvikorpi, Mika Vaha-Nissi, Tuomas Mustonen, Eero Iiskola, Maarit Karppinen

    Research output: Contribution to journalArticleScientificpeer-review

    96 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2654-2658
    JournalThin Solid Films
    Volume518
    Issue number10
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed

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