@article{ed419e22550b438a8a324de6e30d49c6,
title = "Atomic laeyr deposited alumina (A12O3) thin films on a high-Q mechanical silicon oscillator",
keywords = "atomic layer deposition, high-Q-mechanical oscillator, microsystems, atomic layer deposition, high-Q-mechanical oscillator, microsystems, atomic layer deposition, high-Q-mechanical oscillator, microsystems",
author = "Ossi Hahtela and P{\"a}ivi sievil{\"a} and Nikolai Chekurov and Ilkka Tittonen",
year = "2007",
language = "English",
volume = "17",
pages = "737--742",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "4",
}