Atomic force microscopy studies of SnO_2 thin film microstructures deposited by atomic layer epitaxy

M. Utriainen, H. Lattu, H. Viirola, L. Niinistö, R. Resch, G. Friedbacher

    Research output: Contribution to journalArticleScientificpeer-review

    29 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)119-123
    JournalMicrochimica Acta
    Issue number1
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed


    • atomic force microscopy
    • atomic layer epitaxy
    • cross-sectional AFM
    • gas sensor
    • heteroepitaxy
    • tin dioxide

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