Atomic Force Microscopy Studies of SnO_2 Thin Film Microstructure Deposited by Atomic Layer Epitaxy

M. Utriainen, H. Kotilainen, H. Viirola, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication10. Tagung Festkörperanalytik, Wien, Austria, July 5-7, 1999
    Pagesp. KV43
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • AFM
    • ALE
    • atomic force microscopy
    • atomic layer epitaxy
    • thin film
    • tin dioxide

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