Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

Amr Ghazy, David Zanders, Anjana Devi^*, Maarit Karppinen^*

^*Corresponding author for this work

Research output: Contribution to journal › Review Article › peer-review

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ALPMOH: Atomic Layer Processing of Metals, Metal Oxide and Hybrid Thin Films for Advanced Applications
Karppinen, M. (Principal investigator)
16/02/2022 → 29/02/2024
Project: Academy of Finland: Other research funding