Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

Amr Ghazy, David Zanders, Anjana Devi^*, Maarit Karppinen^*

^*Corresponding author for this work

Research output: Contribution to journal › Review Article › peer-review

Active
UniEn-MLD: Unique ALD/MLD-Enabled Material Functions
Karppinen, M. (Principal investigator), Ghazy, A. (Project Member), Kousar, S. (Project Member), Jussila, T. (Project Member), Philip, A. (Project Member), Sederholm, L. (Project Member), Pekkanen, J. (Project Member), Francis, M. (Project Member), Partanen, O. (Project Member), Madadi, M. (Project Member), Saltarelli, L. (Project Member) & Larkiala, S. (Project Member)
01/06/2023 → 31/05/2028
Project: EU: ERC grants
Finished
ALPMOH: Atomic Layer Processing of Metals, Metal Oxide and Hybrid Thin Films for Advanced Applications
Karppinen, M. (Principal investigator)
16/02/2022 → 29/02/2024
Project: Academy of Finland: Other research funding

Projects