Projects per year
Abstract
High-quality rare earth element (R) based thin films are in demand for applications ranging from (opto)electronics and energy conversion/storage to medical diagnostics, imaging and security technologies. Atomic layer deposition (ALD) offers large-area homogeneous and conformal ultrathin films and is uniquely suited to address the requirements set by the potential applications of R-based thin films. The history starts from the 1990s, when the first electroluminescent R-doped thin films were grown with ALD. The interest soon expanded to rare earth element oxide layers as high-k gate dielectrics in semiconductor devices, and later to complex ternary and quaternary perovskite oxides with novel functional properties. The most recent advancements related to the combined atomic/molecular layer deposition (ALD/MLD) have rapidly expanded the family of R-organic hybrid materials with intriguing luminescence and up-conversion properties. This review provides up-to-date insights to the current state of ALD and ALD/MLD research of R-based thin films and highlights their application potential.
Original language | English |
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Article number | 2400274 |
Journal | Advanced Materials Interfaces |
DOIs | |
Publication status | E-pub ahead of print - 23 Aug 2024 |
MoE publication type | A2 Review article, Literature review, Systematic review |
Keywords
- atomic layer deposition
- lanthanides
- molecular layer deposition
- rare earth elements
- thin films
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UniEn-MLD: Unique ALD/MLD-Enabled Material Functions
Karppinen, M. (Principal investigator), Ghazy, A. (Project Member), Kousar, S. (Project Member), Jussila, T. (Project Member), Philip, A. (Project Member), Sederholm, L. (Project Member), Pekkanen, J. (Project Member), Francis, M. (Project Member), Partanen, O. (Project Member) & Madadi, M. (Project Member)
01/06/2023 → 31/05/2028
Project: EU: ERC grants
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ALPMOH: Atomic Layer Processing of Metals, Metal Oxide and Hybrid Thin Films for Advanced Applications
Karppinen, M. (Principal investigator)
16/02/2022 → 29/02/2024
Project: Academy of Finland: Other research funding