Atomic and Molecular Layer Deposition for Surface Modification

Mika Vähä-Nissi, Jenni Sievänen, Erkki Salo, P. Heikkilä, E. Kenttä, Leena-Sisko Johansson, J.T. Koskinen, Ali Harlin

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageEnglish
    JournalJournal of Solid State Chemistry
    Volume214
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

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