Original language | English |
---|---|
Journal | Journal of Solid State Chemistry |
Volume | 214 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Atomic and Molecular Layer Deposition for Surface Modification
Mika Vähä-Nissi, Jenni Sievänen, Erkki Salo, Pirjo Heikkilä, E. Kenttä, Leena-Sisko Johansson, J.T. Koskinen, Ali Harlin
Research output: Contribution to journal › Article › Scientific › peer-review
17
Citations
(Scopus)