Arrhenius and non-Arrhenius behavior during anisotropic etching

M.A. Gosalvez, Risto Nieminen, Kazuo Sato

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
JournalSensors and Materials
Volume17
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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