Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonator

Tuomas Pensala, Markku Ylilammi, Johanna Meltaus, Kimmo Kokkonen

Research output: Working paper › Professional

6 Citations (Scopus)

Original language	English
Pages	1661-1664
Publication status	Published - 2007
MoE publication type	D4 Published development or research report or study

Name	2007 IEEE Ultrasonics Symposium, New York, 28-31.10.2007

Cite this

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title = "Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonator",

author = "Tuomas Pensala and Markku Ylilammi and Johanna Meltaus and Kimmo Kokkonen",

year = "2007",

language = "English",

series = "2007 IEEE Ultrasonics Symposium, New York, 28-31.10.2007",

pages = "1661--1664",

type = "WorkingPaper",

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TY - UNPB

T1 - Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonator

AU - Pensala, Tuomas

AU - Ylilammi, Markku

AU - Meltaus, Johanna

AU - Kokkonen, Kimmo

PY - 2007

Y1 - 2007

M3 - Working paper

T3 - 2007 IEEE Ultrasonics Symposium, New York, 28-31.10.2007

SP - 1661

EP - 1664

BT - Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonator

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