Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonator

Tuomas Pensala, Markku Ylilammi, Johanna Meltaus, Kimmo Kokkonen

Research output: Working paperProfessional

4 Citations (Scopus)
Original languageEnglish
Pages1661-1664
Publication statusPublished - 2007
MoE publication typeD4 Published development or research report or study

Publication series

Name2007 IEEE Ultrasonics Symposium, New York, 28-31.10.2007

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