Approximating circles by polygons in anisotropic echting of (100) silicon

V. Voipio; K. Nera; K. Ruokonen; T. Lamminmäki; I. Tittonen

Approximating circles by polygons in anisotropic echting of (100) silicon

V. Voipio
, K. Nera
, K. Ruokonen
, T. Lamminmäki
, I. Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Eurosensors XIII, The Hague, The Netherlands, September 12-15, 1999
Pages	531-532
Publication status	Published - 1999
MoE publication type	A4 Conference publication

Keywords

anisotropic etching
micromechanics
polygons
silicon

Cite this

@inproceedings{2ccc973dda5541c987a37968cb8e4432,

title = "Approximating circles by polygons in anisotropic echting of (100) silicon",

keywords = "anisotropic etching, micromechanics, polygons, silicon, anisotropic etching, micromechanics, polygons, silicon, anisotropic etching, micromechanics, polygons, silicon",

author = "V. Voipio and K. Nera and K. Ruokonen and T. Lamminm{\"a}ki and I. Tittonen",

year = "1999",

language = "English",

pages = "531--532",

booktitle = "Eurosensors XIII, The Hague, The Netherlands, September 12-15, 1999",

}

TY - GEN

T1 - Approximating circles by polygons in anisotropic echting of (100) silicon

AU - Voipio, V.

AU - Nera, K.

AU - Ruokonen, K.

AU - Lamminmäki, T.

AU - Tittonen, I.

PY - 1999

Y1 - 1999

KW - anisotropic etching

KW - micromechanics

KW - polygons

KW - silicon

KW - anisotropic etching

KW - micromechanics

KW - polygons

KW - silicon

KW - anisotropic etching

KW - micromechanics

KW - polygons

KW - silicon

M3 - Conference article in proceedings

SP - 531

EP - 532

BT - Eurosensors XIII, The Hague, The Netherlands, September 12-15, 1999

ER -