Approximating circles by polygons in anisotropic echting of (100) silicon

V. Voipio, K. Nera, K. Ruokonen, T. Lamminmäki, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationEurosensors XIII, The Hague, The Netherlands, September 12-15, 1999
Publication statusPublished - 1999
MoE publication typeA4 Article in a conference publication


  • anisotropic etching
  • micromechanics
  • polygons
  • silicon

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