Applications of focused ion beam in nanofabrications

Nikolai Chekurov; Kestutis Grigoras; Antti Peltonen; Sami Franssila; Ilkka Tittonen

Applications of focused ion beam in nanofabrications

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Fysiikan päivät 2009, Helsinki
Publication status	Published - 2009
MoE publication type	A4 Conference publication

Keywords

deep reactive ion etching
focuse ion beam
nanofabrication

Cite this

@inproceedings{328ce4ec581945b2b4d5a631d244a474,

title = "Applications of focused ion beam in nanofabrications",

keywords = "deep reactive ion etching, focuse ion beam, nanofabrication, deep reactive ion etching, focuse ion beam, nanofabrication, deep reactive ion etching, focuse ion beam, nanofabrication",

author = "Nikolai Chekurov and Kestutis Grigoras and Antti Peltonen and Sami Franssila and Ilkka Tittonen",

year = "2009",

language = "English",

booktitle = "Fysiikan p{\"a}iv{\"a}t 2009, Helsinki",

}

TY - GEN

T1 - Applications of focused ion beam in nanofabrications

AU - Chekurov, Nikolai

AU - Grigoras, Kestutis

AU - Peltonen, Antti

AU - Franssila, Sami

AU - Tittonen, Ilkka

PY - 2009

Y1 - 2009

KW - deep reactive ion etching

KW - focuse ion beam

KW - nanofabrication

KW - deep reactive ion etching

KW - focuse ion beam

KW - nanofabrication

KW - deep reactive ion etching

KW - focuse ion beam

KW - nanofabrication

M3 - Conference article in proceedings

BT - Fysiikan päivät 2009, Helsinki

ER -