Applications of focused ion beam in nanofabrications

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationFysiikan päivät 2009, Helsinki
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

    Keywords

    • deep reactive ion etching
    • focuse ion beam
    • nanofabrication

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