Applications of atomic layer deposition in nanophotonics

Lasse Karvonen, Antti Säynätjoki, Matthieu Roussey, Markku Kuittinen, Seppo Honkanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    2 Citations (Scopus)
    91 Downloads (Pure)
    Original languageEnglish
    Title of host publicationSPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014
    EditorsJean Emmanuel Broquin, Gualtiero Nunzi Conti
    DOIs
    Publication statusPublished - 2014
    MoE publication typeB3 Non-refereed article in conference proceedings

    Publication series

    NameProceedings of SPIE
    Volume8988
    ISSN (Print)0277-786X

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