Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review


  • kestutis Grigoras
  • Veli-Matti Airaksinen
  • Sami Franssila

  • Lauri Sainiemi
  • Jouni Tiilikainen
  • Antti Säynätjoki

Research units


Original languageEnglish
Title of host publicationInternational Conference on Nanoscience and Technology, Basel, Sveitsi, 30.7-4.8.2006
Publication statusPublished - 2006
MoE publication typeA4 Article in a conference publication

ID: 3675578