Appendix 2 - Nanoindentation characterization of silicon and other MEMS materials

P. Zachariasz, K. Brudziñski, K. Gronicz, S. Nagao, R. Nowak

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies
Subtitle of host publicationMicro and Nano Technologies
Pages623-627
DOIs
Publication statusPublished - 2010
MoE publication typeA3 Part of a book or another research book

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