Anomalous oxygen precipitation in Czochralski-grown silicon wafers

R. Rantamäki, T. Tuomi, M. Taskinen, M. Tilli, P. McNally, J. Curley, A. Danilewsky, B. Schropp

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationHASYLAB-DESY Annual Report 1995
    Pages709
    Publication statusPublished - 1996
    MoE publication typeA3 Part of a book or another research book

    Keywords

    • optoelectronics
    • semiconductors

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