Anomalous oxygen precipitation in Czochralski-grown silicon wafers

R. Rantamäki, T. Tuomi, M. Taskinen, M. Tilli, P. McNally, J. Curley, A. Danilewsky, B. Schropp

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Original language	English
Title of host publication	HASYLAB-DESY Annual Report 1995
Pages	709
Publication status	Published - 1996
MoE publication type	A3 Part of a book or another research book

Keywords

@inbook{4783947542954e70bd133e6b26d7ee50,

title = "Anomalous oxygen precipitation in Czochralski-grown silicon wafers",

keywords = "optoelectronics, semiconductors, optoelectronics, semiconductors, optoelectronics, semiconductors",

author = "R. Rantam{\"a}ki and T. Tuomi and M. Taskinen and M. Tilli and P. McNally and J. Curley and A. Danilewsky and B. Schropp",

year = "1996",

language = "English",

pages = "709",

booktitle = "HASYLAB-DESY Annual Report 1995",

}

TY - CHAP

T1 - Anomalous oxygen precipitation in Czochralski-grown silicon wafers

AU - Rantamäki, R.

AU - Tuomi, T.

AU - Taskinen, M.

AU - Tilli, M.

AU - McNally, P.

AU - Curley, J.

AU - Danilewsky, A.

AU - Schropp, B.

PY - 1996

Y1 - 1996

KW - optoelectronics

KW - semiconductors

KW - optoelectronics

KW - semiconductors

KW - optoelectronics

KW - semiconductors

M3 - Chapter

SP - 709

BT - HASYLAB-DESY Annual Report 1995

ER -