Annealing of vacancy complexes in P-doped silicon

Maria Ganchenkova, V.A. Borodin, Risto Nieminen

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
Original languageEnglish
JournalNuclear Instruments and Methods B
Volume228
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Cite this