Annealing Behaviour of Deuterium in Silicon Doped Carbon Films

Jari Likonen, E. Vainonen-Ahlgren, Tommy Ahlgren, S. Lehto, T. Sajavaara, Walter Rydman, J. Keinonen, Jukka Katainen, C.H. Wu

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)445-450
JournalContributions to Plasma Physics
Issue number2-4
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed


  • DLC, Silicon, Carbon, Film

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