Original language | English |
---|---|
Pages (from-to) | 445-450 |
Journal | Contributions to Plasma Physics |
Volume | 42 |
Issue number | 2-4 |
Publication status | Published - 2002 |
MoE publication type | A1 Journal article-refereed |
Keywords
- DLC, Silicon, Carbon, Film
Jari Likonen, E. Vainonen-Ahlgren, Tommy Ahlgren, S. Lehto, T. Sajavaara, Walter Rydman, J. Keinonen, Jukka Katainen, C.H. Wu
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 445-450 |
Journal | Contributions to Plasma Physics |
Volume | 42 |
Issue number | 2-4 |
Publication status | Published - 2002 |
MoE publication type | A1 Journal article-refereed |