Analytical problems in thin film deposition and characterization by atomic layer epitaxy

Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication8. Tagung Festkörperanalytik, Wien, 3.-5.7.1995
    Place of PublicationWien
    PublisherTechnische Universität Wien
    Pagess. 22
    Publication statusPublished - 1995
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ale
    • analysis
    • atomic layer epitaxy
    • characterization
    • thin film

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