Analytical problems in thin film deposition and characterization by atomic layer epitaxy

Lauri Niinistö

Analytical problems in thin film deposition and characterization by atomic layer epitaxy

Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	8. Tagung Festkörperanalytik, Wien, 3.-5.7.1995
Place of Publication	Wien
Publisher	Technische Universität Wien
Pages	s. 22
Publication status	Published - 1995
MoE publication type	A4 Article in a conference publication

Keywords

ale
analysis
atomic layer epitaxy
characterization
thin film

Cite this

@inproceedings{bcad306ae0ec4cdf9dab1db53f1bd8f9,

title = "Analytical problems in thin film deposition and characterization by atomic layer epitaxy",

keywords = "ale, analysis, atomic layer epitaxy, characterization, thin film, ale, analysis, atomic layer epitaxy, characterization, thin film, ale, analysis, atomic layer epitaxy, characterization, thin film",

author = "Lauri Niinist{\"o}",

year = "1995",

language = "English",

pages = "s. 22",

booktitle = "8. Tagung Festk{\"o}rperanalytik, Wien, 3.-5.7.1995",

publisher = "Technische Universit{\"a}t Wien",

}

TY - GEN

T1 - Analytical problems in thin film deposition and characterization by atomic layer epitaxy

AU - Niinistö, Lauri

PY - 1995

Y1 - 1995

KW - ale

KW - analysis

KW - atomic layer epitaxy

KW - characterization

KW - thin film

KW - ale

KW - analysis

KW - atomic layer epitaxy

KW - characterization

KW - thin film

KW - ale

KW - analysis

KW - atomic layer epitaxy

KW - characterization

KW - thin film

M3 - Conference contribution

SP - s. 22

BT - 8. Tagung Festkörperanalytik, Wien, 3.-5.7.1995

PB - Technische Universität Wien

CY - Wien

ER -