Analysis of vibration modes in a micromechanical square-plate resonator

Research output: Contribution to journalArticleScientificpeer-review

Researchers

Research units

  • VTT Technical Research Centre of Finland

Details

Original languageEnglish
Article number015028
Pages (from-to)1-11
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number1
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

    Research areas

  • scanning laser interferometer, square-plate resonator, vibration modes

ID: 3600463