Analysis of vibration modes in a micromechanical square-plate resonator

Olli Holmgren, Kimmo Kokkonen, Timo Veijola, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jouni Knuuttila, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Article number015028
Pages (from-to)1-11
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number1
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

Keywords

  • scanning laser interferometer
  • square-plate resonator
  • vibration modes

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