Analysis of simultaneous boron and phosphorus diffusion gettering in silicon

Jonas Schön, M.C. Schubert, W. Warta, Hele Savin, Antti Haarahiltunen

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)
Original languageEnglish
Pages (from-to)25892592
JournalPhysica Status Solidi (A) Applications and Materials Science
Issue number11
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

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