Analysis of ALD-processed thin films by ion-beam techniques

Matti Putkonen, Timo Sajavaara, Lauri Niinistö, Juhani Keinonen

    Research output: Contribution to journalArticleScientificpeer-review

    67 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1791-1799
    JournalAnalytical and Bioanalytical Chemistry
    Volume382
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Atomic layer deposition
    • Electroluminescent displays
    • High-k insulators
    • Ion-beam techniques
    • Thin films

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