An examination of the crystalline quality of 200 mm diameter silicon substrates using x-ray topography

J. Curley, P.J. McNally, A. Reader, T. Tuomi, M. Taskinen, R. Rantamäki, A. Danilewsky, B. Schropp

    Research output: Working paperProfessional

    Original languageEnglish
    Pages869-870
    Publication statusPublished - 1997
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameHASYLAB-DESY Annual Report 1996 I

    Keywords

    • crystalline
    • silicon
    • x-ray topography

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